Genesis Vacuum Technologies, Inc.

Waterpump Data Sheet

Genesis Vacuum Technologies offers a waterpump design for installation in process chambers, transfer modules, and load locks. Our single stage coldhead is among the most powerful on the market and provides an exceptional 90 Watts of power at 123 K. Genesis will provide custom cryopanel designs and configurations to meet customer requirements.

ICP Waterpump Features

4 Reduction in pumpdown time to base pressure of up to 75%
4 Enhanced process yields through lower water vapor partial pressure
4 Temperature control for selective gas pumping
4 Regeneration via Gen 2 Controller
4 Plug and Play capability with Gen 2 Controller. (No dedicated Gen 2 module is required)
4 Operates with standard Genesis helium compressor

Waterpump Configuration Options

Cryopanel Configurations: The waterpump can be configured with a 4" Con Flat flange for flush mounting to the chamber location or a custom designed body can be provided for an exact fit-up to the process chamber. The cryopanels can be provided to meet specific customer configurations.

General Performance Specifications

16,000 liters/sec pumping speed.
90 Watts of power at 123 degrees Kelvin.

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