Genesis Vacuum Technologies provides controllers for cryopump applications used in large semiconductor process tools, research, universities, and other high vacuum applications. Constant monitoring and control of cryopumps is a necessity for optimum pump performance. Full regeneration is completely automated and performs every operation necessary to release and expel all captured gases, renewing the first and second stage pumping surfaces to their full capacity. A quick regeneration process releases and expels light gas capture on the second stage, such as nitrogen and argon. For this process, the pump is partially warmed to provide quick pump readiness.

Communications, monitoring, and safety are important. The cryopump controllers provide direct RS232 and pump networking to the host computer. A full command set is available to provide complete control and pump status