Genesis offers helium compressor solutions for both single cryopump operation
and multiple pump operation. The Genesis compressor supplies compressed
helium to the cryopump which drives the cryopump's refrigeration cycle.
Genesis currently offers two different compressor models.
2.1 Compressor: The 2.1 Compressor is an extremely reliable and cost
effective solution for applications which require only one cryopump.
The 2.1 Compressor provides 2 kW of refrigeration power and can effectively
operate a single cryopump as large as the Genesis ICP300 cryopump.
HC60 Compressor: The HC60 Compressor provides a powerful solution for
applications which require multiple cryopump operation. The compressor
can operate up to three Genesis ICP250 cryopumps with 6 kW of refrigeration
power. The HC60 Compressor has the smallest footprint available for
a multipump compressor.
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