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ICP 320+ General Specifications

Model
ICP 320+
ICP 320L+
Pumping Speed
(Liter/sec)
Nitrogen
3200
Hydrogen
7800
8200
Argon
2665
Water
11000
Reachable Pressure
Torr
10 -9
Maximum Flow Rate for Argon
Torr L / sec
13.0
Pumping Capacity
(Std. Liters)
Argon
2100
Hydrogen
38
Crossover
Torr L
300
Standard Cooldown Time
min.
97
Standard Regeneration Time
Full Regeneration
min

135
Quick Regeneration
min.

70
Weight
Kg
34
21
Flange Options
ISO Clamp

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