|
Model
|
ICP 200
|
ICP 200 Q
|
Pumping Speed
(Liter/sec) |
Nitrogen
|
1500
|
|
Hydrogen
|
2200
|
|
Argon
|
1200
|
|
Water
|
4000
|
| Reachable Pressure |
Torr
|
10 -9
|
Maximum Flow Rate for Argon
|
Torr L / sec
|
10.0
|
Pumping Capacity
(Std. Liters) |
Argon
|
1100
|
|
Hydrogen
|
30
|
| Crossover |
Torr L
|
300
|
| Standard Cooldown Time |
min.
|
85
|
| Standard Regeneration Time |
Full Regeneration
min.
|
115
|
|
Quick Regeneration
min.
|
45
|
| Weight |
Kg
|
22
|
| Flange Options |
ANSI ASA, ANSI ASA Rotatable, ISO Clamp, ISO Bolted,
Conflat, Con Flat Rotatable, JIS |
