|
Model
|
ICP 150
|
ICP 150 Q
|
Pumping Speed
(Liter/sec) |
Nitrogen
|
660
|
|
Hydrogen
|
1300
|
|
Argon
|
550
|
|
Water
|
2200
|
| Reachable Pressure |
Torr
|
10 -9
|
Maximum Flow Rate for Argon
|
Torr L / sec
|
6.0
|
Pumping Capacity
(Std. Liters) |
Argon
|
860
|
|
Hydrogen
|
10
|
| Crossover |
Torr L
|
150
|
| Standard Cooldown Time |
min.
|
80
|
| Standard Regeneration Time |
Full Regeneration
min.
|
100
|
|
Quick Regeneration
min.
|
45
|
| Weight |
Kg
|
11
|
| Flange Options |
ANSI ASA, ANSI ASA Rotatable, ISO Clamp, ISO
Bolted, Con Flat, Conflat Rotatable, JIS
|
