|
Model
|
ICP 100
|
ICP 100 Q
|
Pumping Speed
(Liter/sec) |
Nitrogen
|
600
|
|
Hydrogen
|
750
|
|
Argon
|
500
|
|
Water
|
1100
|
| Reachable Pressure |
Torr
|
10 -9
|
Maximum Flow Rate for Argon
|
Torr L / sec
|
5.0
|
Pumping Capacity
(Std. Liters) |
Argon
|
90
|
|
Hydrogen
|
2
|
| Crossover |
Torr L
|
55
|
| Standard Cooldown Time |
min.
|
50
|
| Standard Regeneration Time |
Full Regeneration
min.
|
70
|
|
Quick Regeneration
min.
|
35
|
| Weight |
Kg
|
10
|
| Flange Options |
ANSI ASA, ANSI ASA Rotatable, ISO Clamp, ISO
Bolted, Con Flat, Conflat Rotatable, JIS
|
