The Genesis Gen 3 controller offers a cost-effective way to control up to five pumps
with one controller, providing all the necessary controls circuits for conducting normal
Cryopump operation as well as full and quick-regeneration. The network interface
provides connections to an RS-232 host computer or to the Genesis cryopump network
with remote control capability for added customer flexibility.
Dimensions
Height
5.2 in.
Width
18.95 in.
Depth
17.2 in.
Weight
26lbs. (11.8kg)
Communications:
Bitbus network via RS-485
Host connection via RS-232
Two programmable relay outputs,
Contact Rating
30VDC at 1A
Operating Temp.
32°F to 122°F (0°C to 50°C)
Power Required
208VAC, 50/60Hz, 600W
CE Mark
Meets the requirements of European Directive on
Electromagnetic Compatability (89/336/ECC) and low voltage directive
(73/23/ECC)
SEMI
Meets SEMI-S2 Environmental, Health, and Safety Guidelines
for Semiconductor Manufacturing Equipment, and SEMI-S8 Safety Guidelines for
Ergonomics Engineering for Semiconductor Equipment.