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The Genesis Gen 3 controller offers a cost-effective way to control up to five pumps with one controller, providing all the necessary controls circuits for conducting normal Cryopump operation as well as full and quick-regeneration. The network interface provides connections to an RS-232 host computer or to the Genesis cryopump network with remote control capability for added customer flexibility.



Dimensions
  

  Height

5.2 in.

  Width

18.95 in.

  Depth

17.2 in.

  Weight

26lbs. (11.8kg)
Communications:
Bitbus network via RS-485
Host connection via RS-232
Two programmable relay  outputs, Contact Rating
30VDC at 1A
Operating Temp.
32°F to 122°F (0°C to 50°C)
Power Required
208VAC, 50/60Hz, 600W
CE Mark
Meets the requirements of European Directive on Electromagnetic Compatability (89/336/ECC) and low voltage directive (73/23/ECC)
SEMI
Meets SEMI-S2 Environmental, Health, and Safety Guidelines for Semiconductor Manufacturing Equipment, and SEMI-S8 Safety Guidelines for Ergonomics Engineering for Semiconductor Equipment.


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